SR Particle改善方案英文

SR Particle improvement 1、Main improvement points 1. All EQ use efficient FFU； 2. All axis of motion above the stage should be install the dust cover 3. Decrease the number of tank chain of axis of motion above the stage to control the dust 4. Optimize the electrical line setting in the EQ 5. Other：making the EQ cleaning plan including periodically and before using。 2、Optimization content 1. All EQ use efficient FFU As the picture below, the EQ including loading, dispenser, unloading should be changed to efficient FFU. The Air flow will remove the dust by the windows around the EQ to improve the air cleanliness of the EQ. 2. All axis of motion above the stage should be install the dust cover AS the picture below, the dust cover would be installed around all the Axis of motion to avoid the dust made by lead screw and guide rail dropping on the stage. 3. Decrease the number of tank chain of axis of motion above the stage to control the dust As the picture below, all electrical lines setting in the axis of motion are made by IGUS. Moreover, they has been encapsulated by non-dust cloth to decrease the dust. 4. Optimize the electrical line setting in the EQ Set the electrical lines under the base board as much as possible. The line set in the up rack should be put in the proximate matter to reduce dust.                                        5. Other：making the EQ cleaning plan including periodically and before using Cleaning the stage surface every day.  Cleaning inside EQ every week. Make the cleaning plan according to the actual condition.