国家同步辐射研究中心TPS X-光光束线铍窗规格书 1 Specification of

国家同步辐射研究中心TPS X-光光束线铍窗规格书 1 Specification of . 國家同步輻射研究中心TPS X-光光束線鈹窗規格書 Specification of beryllium windows for the TPS X-ray Beamlines at the NSRRC June, 2012 Copyright ? 2012 National Synchrotron Radiation Research Center (NSRRC). This document is the property of NSRRC. No exploitation or transfer of any information contained herein is permitted in the absence of an agreement with NSRRC, and neither the document nor any such information may be released without the written consent of NSRRC. National Synchrotron Radiation Research Center 101 Hsin-Ann Road, Hsinchu Science Park, Hsinchu 30076, Taiwan 1 1. Introduction and scope This specification establishes the requirements for the design; supply of fabrication and assembly drawings; materials; manufacture; inspection; testing of all components requested in the contract; delivery of UHV beryllium windows for TPS X-ray beamlines at the NSRRC. 2. Basic qualifications of tenderers -10The specification is specified the beryllium windows used under UHV (2×10 Torr), high temperature (150?) and high energy radiation:5~30 keV:conditions on the X-ray beamlines at synchrotron facilities. Tenderers shall provide the documents to demonstrate capabilities to manufacture and supply the 0.1μm polished IF-1 foil beryllium windows, such as the surface finish inspection reports, previous order and delivery documents for the 0.1μm polished IF-1 foil beryllium windows for the synchrotron facilities worldwide. 2. 廠商基本資格 此次採購的標的是超高真空精密拋光型鈹窗,其使用在同步輻射X光光束線超高真 空(2×10-10 Torr)、高溫(150?)及高能輻射(5~30 keV)的特殊環境下。投標廠商必須 有製造或供應超高真空水冷式鈹窗及IF-1型鈹片拋光至面粗造度達0.1μm以下之 履約能力證明。投標時,廠商必須提供曾完成超高真空水冷式鈹窗及IF-1型鈹片拋 光至表面粗造度達0.1μm之製造、供應及承做之證明文件,如表面粗造度達0.1μm IF-1型鈹窗之表面粗造度檢驗報告、訂單及合約。 3. Drawings The following drawings, of the issue in effect on date of invitation for bids, form a part of this specification to the extent specified herein. Drawings TPS 05A beryllium window I TPS 05A beryllium window II 4. Requirements 4.1 General These beryllium windows will be used to protect the machine and beamline vacuum at the TPS facility. The beryllium windows are ultra-high vacuum compatible components. 4.2 Operating Conditions -10Vacuum range:< 2×10 Torr Temperature range:10? to 150? 2 Maximum bake-out temperature:450? 4.3 Material The beryllium foil is the vacuum tight IF-1 type, purity of 99.8% beryllium assay minimum by specification. The flanges and the tubes are 304L stainless steel. The cooling plate is OFHC copper. 4.4 Surface finish The beryllium foil is polished finish to a surface roughness of 0.1μm or better on both sides. 4.5 Fabrication tolerances All beryllium window dimensions carry a ?0.5 mm linear and ?0.5? angular tolerance. 4.6 Bolt holes The orientation and the types of the bolt holes on the beryllium windows shall according to the drawings. 4.7 Vacuum brazing and diffusion brazing For TPS 05A beryllium window I, an OFHC copper cooling plate is joined to two 2.75 inch CF flanges by vacuum furnace brazing. In the center of this copper plate there is a window of diameter 10 mm, onto which a beryllium foil with thickness of 0.25 mm is diffusion bond brazing on the copper plate. Vacuum brazed and diffusion bonded assemblies are guaranteed bakeable to 450?. For TPS 05A beryllium window II, there is a window of diameter 12 mm in the center of the 2.75 inch CF flange, onto which a beryllium foil with thickness of 0.25 mm is diffusion bond brazing on the flange. Diffusion bonded assemblies are guaranteed bakeable to 450?. 4.8 Leak testing The beryllium windows are leak tested using helium mass spectrometer to no leak -10greater than 2×10 mbar?l/s leak rate. 4.9 Pressure testing TPS 05A beryllium window I shall be bi-directional tested for to 1 atm differential pressure. 4.10 Cleaning All cleaning processes of the beryllium windows shall meet UHV requirements. 5. SCOPE OF SUPPLY 3 5.1 The following beryllium windows shall be fully tested and delivered to the NSRRC: TPS 05A beryllium window I, 2 piece TPS 05A beryllium window II, 5 piece 5.2 Customer approval drawings The vendor will produce drawings necessary to manufacture beryllium windows as required in this specification. The customer approval drawings for the above-mentioned beryllium windows shall be sent to NSRRC for checking within two weeks. This check is needed to verify the compatibility of the drawings with the specification. The manufacturing of the beryllium windows can only begin after the NSRRC completes the check and signs on customer approval drawings, and then email back to the vender. 5.3. Documentation All necessary investigations, like dimensional control, material list and leak checks will be documented and are part of the deliverables. 5.3.1The following material certificates shall be provided by the vendor for customer to check before acceptance: Type IF-1 beryllium foil Type 304L stainless steel Type OFHC copper 5.3.2The following testing documents shall be provided by the vendor for customer to check before acceptance: Leak testing reports for the beryllium windows Surface finish inspection reports for the beryllium windows Bi-directional 1 atm differential pressure testing records for TPS 05A beryllium window I 6. PREPARATION FOR DELIVERY 6.1 Material finishing The finished pieces shall be thoroughly cleaned and free from any organic low-vapor pressure material or cutting fluid. 6.2 Delivery The beryllium windows shall be completed and delivered DDU at NSRRC’s Jobsite, Hsinchu, Taiwan. 6.3 Packaging The beryllium windows shall be packaged in its own protective container. The container 4 must be capable of being sealed tightly to prevent dust and moisture from entering. 6.4 Packing Packing for shipment shall insure that the beryllium windows are insulated from severe shock and rough handling. Shock sensors shall be affixed directly to packing boxes to detect and record impact and mishandling. Packing marking shall indicate the fragile contents. 5